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An automated wafer-handling system based on the integrated circuit equipments

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5 Author(s)
Cong Ming ; Sch. of Mech. Eng., Dalian Univ. of Technol. ; Zhou Yumin ; Jiang Ying ; Kang Renke
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Based on the integrated circuit equipments, this paper respectively introduces the constitute and function of the automated wafer-handling system, the design and principle of the wafer-handling robot, wafer positioning system, and end-effector calibration system. This paper studies the up-down and rotation component, radial linear stretch component, end rotation component and the principle of work. The kinematics analysis of the linear mechanism of radial stretch component is presented

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2005 IEEE International Conference on Robotics and Biomimetics - ROBIO

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