By Topic

Multi-Probe SPM using Fringe Patterns for a Parallel Nano Imaging

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Koyama, H. ; Dept. of I.M.S.E., Kagawa Univ., Takamatsu ; Oohira, F. ; Hosogi, M. ; Hashiguchi, G.

This paper proposes a multi-probe SPM using fringe patterns which is able to measure the large area. The composition of the chip accumulates 50,000 probes in the area of 5 mmtimes5 mm. We fabricated the multi probes, and by using the chip the fringe patterns image could be taken with the CCD camera

Published in:

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Date of Conference:

21-24 Aug. 2006