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Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics

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5 Author(s)
Il Woong Jung ; Dept. of Electr. Eng., Stanford Univ., CA ; Peter, Y.-A. ; Carr, E. ; Jen-Shiang Wang
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We present a single-crystal-silicon (SCS) continuous membrane deformable minor array with applications as a corrective adaptive optics element for space-based telescopes. The continuous membrane is made from a thin silicon-on-insulator (SOI) layer with good optical surface quality. The membrane is able to deform locally by 125 nm at 100 V with a resonance frequency of 25 kHz

Published in:

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Date of Conference:

21-24 Aug. 2006

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