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Gimbaled 2D Scanning Mirror with Vertical Combs for Laser Display

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13 Author(s)
Young-Chul Ko ; Micro Syst. Lab., Samsung Adv. Inst. of Technol., Suwon ; Jin-Ho Lee ; Jin-Woo Cho ; Yong-Hwa Park
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We designed a gimbaled 2D scanning mirror (GSM) which is driven electrostatically by vertical comb fingers. The horizontal scanning mirror with a diameter of 1 mm is rotating with respect to y-axis in the eye-shaped frame. For vertical scanning, the eye-shaped frame is rotating with respect to x-axis which is perpendicular to the horizontal scanning axis. This GSM can be actuated in two axes simultaneously resulting in the realization of 2D image in the screen with single beam raster scanning. We obtained a mechanical scanning angle of plusmn8deg(resonance) and plusmn4.2deg(non-resonance), with the resonant frequency range of 24~24.5 kHz and 800~900 Hz under the sinusoidal and triangular driving voltages for horizontal and vertical scanning, respectively

Published in:

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.

Date of Conference:

21-24 Aug. 2006