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High Fill-Factor Arrays of Flexure Hinge Type Micromirrors for Multi Object Spectroscopy

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6 Author(s)
S. Waldis ; Inst. of Microtechnol., Neuchatel Univ. ; P. -A. Clerc ; W. Noell ; M. Zickar
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Micromirror arrays have been fabricated dedicated to astronomical instrumentation. The 100times200 mum2 sized micromirrors show an excellent optical surface quality and can be electrostatically tilted by 20deg. A system of multiple landing beams have been implemented, which forces uniform tilt angle

Published in:

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.

Date of Conference:

21-24 Aug. 2006