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Vertical Resonant Comb Actuators for Fourier Transform Spectroscopy

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2 Author(s)
Ataman, C. ; Opt. Microsyst. Lab., Koc Univ., Sariyer ; Urey, H.

A Fourier transform spectrometer is implemented with resonant mode out-of-plane comb actuators which are used as movable diffraction gratings. 106 mum deflection is obtained at 28 V in ambient pressure at 1.2 KHz for a 3 mm clear aperture device

Published in:

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Date of Conference:

21-24 Aug. 2006