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Compact and Stress-Released Piston Tip-Tilt Mirror

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6 Author(s)
Noell, W. ; Inst. of Microtechnol., Neuchatel Univ. ; Hugi, A. ; Overstolz, T. ; Waldis, S.
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A compact stress-compensating micromirror design was fabricated and characterized that provides optically flat surfaces and large 3D displacement. Suitable applications are tunable optical-cavity devices (lasers, filters, etc.), beam steerers and scanners, and deformable mirrors

Published in:

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Date of Conference:

21-24 Aug. 2006