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Fully-Functional Tip-Tilt-Piston Micromirror Array

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3 Author(s)
Milanovic, V. ; Adriatic Res. Inst., Berkeley, CA ; Castelino, Kenneth ; McCormick, D.

A fully-functional 2times2-element array of tip-tilt-piston micromirrors with large deflection angles and large piston range is presented. The fabrication of micromirrors with different technique is described

Published in:

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Date of Conference:

21-24 Aug. 2006