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Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays

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22 Author(s)
F. Pardo ; Lucent Technol. Bell Labs., Murray Hill, NJ ; M. E. Simon ; V. A. Aksyuk ; R. Ryf
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We present arrays of electrostatically actuated 64times64 piston-tip-tilt micromirrors realized using a surface micromachining 3-structural-layer polysilicon process. High fill factor, flat mirrors 120 mum in size have mechanical response in the order of 10 mus, with plusmn4 mechanical tip and tilt and 5 mum piston continuous, controllable range under 110 V. The actuator design is based on four dual in-plane comb drives with 0.5 mum critical features size

Published in:

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.

Date of Conference:

21-24 Aug. 2006