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Bright Green Visible Electroluminescence from Rare Earth Doped Silicon Rich SiOx

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10 Author(s)
MacElwee, T.W. ; Group IV Semicond. Inc.,, Ottawa, Ont. ; Hill, S.E. ; Campbell, S. ; Ducharme, D.
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Silicon rich silicon oxide was deposited by ECR-PECVD, doped with Er or Tb, and processed into device structures. Electrical measurements were used to characterize conduction mechanisms while spectroscopic electroluminescence provided information on brightness and mechanisms

Published in:

Group IV Photonics, 2006. 3rd IEEE International Conference on

Date of Conference:

13-15 Sept. 2006

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