We demonstrate a fully CMOS processed Ge p-i-n photodetector integrated with a Si waveguide on a SOI platform with a high responsivity of 1.0 A/W at lambda=1520 nm, and a 3 dB bandwidth of >4.5 GHz measured at lambda=1550 nm
Published in:
Group IV Photonics, 2006. 3rd IEEE International Conference on
Date of Conference: 13-15 Sept. 2006