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Light injection in SOI microwaveguides using high-efficiency grating couplers

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9 Author(s)
Vivien, L. ; Inst. d''Electron. Fondamentale, Orsay ; Pascal, D. ; Lardenois, S. ; Marris-Morini, D.
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An experimental characterization of the grating couplers for sub-micrometer silicon-on-insulator (SOI) waveguides is presented. The grating couplers have been designed, realized, and characterized for the +1 diffraction order at an operating wavelength of 1.31 mum for TE polarization. At the resonant angle, a coupling efficiency higher than 55% has been measured. The angular coupling range and the wavelength tolerance have been evaluated to 3deg and 20 nm, respectively. The grating coupler is followed by a taper, and about 50% of the input power at 1.31 mum is coupled into sub-micrometer rib and strip SOI waveguides. The ration between light power decoupled toward the cladding and light power decoupled toward the substrate is about three

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Lightwave Technology, Journal of  (Volume:24 ,  Issue: 10 )