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Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass

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4 Author(s)
J. -B. Orhan ; Inst. of Microelectron. & Microsystems, Ecole Polytech. Fed. de Lausanne ; V. K. Parashar ; A. Sayah ; M. A. M. Gijs

We propose a new replication process for the realization of thick microlenses in SiO2 glass with low organic content. We start by replicating an array of cylindrical micropillars made in SU-8 negative photoresist (Microchem) into poly-dimethylsiloxane (PDMS). The PDMS replica is filled with a photoresist (Clariant AZ 9260), applied to a glass substrate and soft-baked. After demoulding, we obtain cylindrical pillars that are given a dome-like shape by a thermal softening. This structure is used as a master in a second PDMS replication step. An in-house developed sol-gel glass material with low organic content is then poured in the second PDMS replica and subsequently thermally treated to obtain an array of thick, dense and crack-free microlenses. We characterize the shrinkage and the surface roughness of the microlenses. Using imaging of millimeter-size objects in an optical microscope setup, we characterize basic optical properties of the lenses, like focal length, magnification, and distribution of the light intensity around the focal plane

Published in:

Journal of Microelectromechanical Systems  (Volume:15 ,  Issue: 5 )