We are currently experiencing intermittent issues impacting performance. We apologize for the inconvenience.
By Topic

Integration of Thin-Film Galfenol With MEMS Cantilevers for Magnetic Actuation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Basantkumar, R.R. ; Dept. of Electr. & Comput. Eng., Minnesota Univ. ; Stadler, B.J.H. ; Robbins, W.P. ; Summers, E.M.

Galfenol (Fe1-xGax, where x ranges from 0.19 to 0.30) thin films have been successfully fabricated onto thin glass cover slides using RF sputtering. The Ga composition in the thin films was controlled by the forward power. The films had a preferred (110) orientation. The magnetic response as a function of applied magnetic field was examined using vibrating sample magnetometry (VSM). The crystallography and composition of these films were measured using X-ray (XRD) and electron diffractions, and energy dispersive spectroscopy (EDS), respectively. A capacitance bridge method was used to measure saturation magnetostrictions of up to 147 ppm. Finally, the thin films of Galfenol were integrated with MEMS cantilevers for magnetic actuation

Published in:

Magnetics, IEEE Transactions on  (Volume:42 ,  Issue: 10 )