Integration of Thin-Film Galfenol With MEMS Cantilevers for Magnetic Actuation

Galfenol (Fe
_1-x
Ga
_x
, where x ranges from 0.19 to 0.30) thin films have been successfully fabricated onto thin glass cover slides using RF sputtering. The Ga composition in the thin films was controlled by the forward power. The films had a preferred (110) orientation. The magnetic response as a function of applied magnetic field was examined using vibrating sample magnetometry (VSM). The crystallography and composition of these films were measured using X-ray (XRD) and electron diffractions, and energy dispersive spectroscopy (EDS), respectively. A capacitance bridge method was used to measure saturation magnetostrictions of up to 147 ppm. Finally, the thin films of Galfenol were integrated with MEMS cantilevers for magnetic actuation