By Topic

Novel Three-Dimensional Beam Tracking System for Stationary-Sample-Type Atomic Force Microscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Shao-Kang Hung ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei ; Li-Chen Fu

The stationary-sample (scanning-probe)-type atomic force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major challenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize "false deflection" is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:55 ,  Issue: 5 )