Referenced Items are not available for this document.
The stationary-sample (scanning-probe)-type atomic force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major challenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize "false deflection" is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy
Published in:
Instrumentation and Measurement, IEEE Transactions on
(Volume:55
,
Issue:
5
)
Date of Publication: Oct. 2006
- Page(s):
- 1648 - 1654
- ISSN :
- 0018-9456
- INSPEC Accession Number:
- 9116402
- Digital Object Identifier :
- 10.1109/TIM.2006.881571
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 September 2006
- Issue Date :
- Oct. 2006
- Sponsored by :
- IEEE Instrumentation and Measurement Society
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