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Laser Radar Imager Based on 3D Integration of Geiger-Mode Avalanche Photodiodes with Two SOI Timing Circuit Layers

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14 Author(s)
Aull, B. ; MIT Lincoln Lab., Lexington, MA ; Burns, J. ; Chenson Chen ; Felton, B.
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A 64times64 laser-radar (ladar) detector array with 50mum pixel size measures the arrival times of single photons using Geiger-mode avalanche photodiodes (APD). A 3-tier structure with active devices on each tier is used with 227 transistors, six 3D vias and an APD in each pixel. A 9b pseudorandom counter in the pixel measures time. Initial imagery shows 2ns time quantization

Published in:

Solid-State Circuits Conference, 2006. ISSCC 2006. Digest of Technical Papers. IEEE International

Date of Conference:

6-9 Feb. 2006