By Topic

Fabrication of PZT sol gel composite ultrasonic transducers using batch fabrication micromolding

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Guofeng Pang ; Dept. of Phys., Queen''s Univ., Kingston, Ont. ; Sayer, Michael ; Lockwood, G.R. ; Watt, M.

A new micromolding technique for fabricating high-frequency (>20 MHz) ultrasound transducers has been developed. The technique combines sol gel processing with an epoxy-based, photo-resist Su-8 micromold to form miniature PZT structures. An advantage of this technique as compared to more traditional lithographic galvanforming and abforming (LIGA) processing is that the intermediate step of producing a nickel-plated mold is avoided. Instead, the PZT is formed directly using a photo-resist. The resulting structures can be fabricated with aspect ratios up to 3:1 and thicknesses up to 50 mu. We have successfully fabricated 50-mu thick linear array elements with 23-mu-wide elements separated by 15 kerfs. A 50-mu thick, 2.5-mm diameter, five-element annular array structure with 20-mu kerfs also has been fabricated. The micromolded PZT composite has a density of 5.7-5.8 plusmn 0.4 g/cm3 and a thickness coupling coefficient as high as 0.32

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:53 ,  Issue: 9 )