A 10.4 in.-diagonal full-colour TFT-LCD with new self-aligned a-Si TFTs for OHP system

A 10.4-in-diagonal full-color a-Si TFT-LCD (thin-film transistor liquid crystal display) for OHP (overhead projector) systems has been developed. The light degradation of LCD performance has been suppressed by new self-aligned a-Si TFTs and a new driving method (floating gate driving method). Both an ES (etching stopper)-SiN/sub x/ layer and a mu c-Si(n+)a-Si(i) layer were formed by the self-alignment technique. This structure is considered to be effective for decreasing the photocarrier injected into the gate-insulator. High stability under high intense light-exposure has been obtained. The driving method makes the difference of the potential between the gate and drain electrode constant. It improved the off characteristics and decreased the shift of the gate bias voltage transparency characteristics.<
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