Cart (Loading....) | Create Account
Close category search window
 

Continuous monitoring and mini-environments: closing the environmental-control loop

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Mara, K. ; IBM, Essex Junction, VT, USA ; Greenstein, B.

A photolithography process has been designed for use at IBM's semiconductor manufacturing facility, in Essex Junction, Vermont that incorporates the use of mini-environments with continuous, real-time environmental monitoring and control. The goals for this system were to significantly reduce human contact with the process and product, isolate the tool environment, and continuously monitor all relevant environmental parameters, including airborne particle contamination, ambient air temperature, and relative humidity. Implementing this system has provided a new level of isolation between product and the operator. With this isolation and tight environmental control, an improvement in cleanliness of two orders of magnitude relative to the, clean room aisle has been achieved. Continuous monitoring of environmental parameters adds a means of maintaining and optimizing the systems performance. Investigations made into the correlations between a variety of environmental factors and process performance are discussed

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991

Date of Conference:

21-23 Oct 1991

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.