The author describes experience gained with a quickly implemented, widely used, and user-maintained expert system for maintenance supervisors and workers at a leading manufacturer of silicon wafers. Attention is given to understanding the application; designing a user-appropriate human interface; and a guide to successful implementation
Published in:
Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991
Date of Conference: 21-23 Oct 1991