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World class manufacturing CIM or sink

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2 Author(s)
Miller, D.J. ; IBM, Essex Junction, VT, USA ; Anastasio, F.J.

The authors consider the computer integrated manufacturing (CIM) system developed and implemented in IBM's semiconductor manufacturing line in its Essex Junction, Vermont, facility. The CIM system architecture and the features designed into the system to support the 16-Mb DRAM technology program are described. Major hardware, software, architecture, and integration components are discussed, including equipment control, automation, automatic processing, logistics management, supervision and control capabilities, database integration, networks, and interfaces

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991

Date of Conference:

21-23 Oct 1991