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DLC Film Fabrication on the Inner Surface of a Cylinder by Carbon Ion Implantation

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5 Author(s)
Yuhang Wang ; Sch. of Mater. Sci & Eng., Harbin Inst. of Technol. ; Wang, Langping ; Yonghao Yu ; Kuifeng Mu
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To synthesize good diamond-like carbon (DLC) films on the inner surface of a cylinder, C2H2 plasma should be generated uniformly in the cylinder. In this study, glow discharge C2H2 plasma was generated by a high pulsed bias voltage applied on the cylinder, and ions were accelerated and implanted into the sample by the same bias. The effect of pulse frequency of the bias and working pressure on the discharge characteristics was investigated. In addition, the ball-on-disk test and Raman spectroscopy were used to characterize the as-deposited DLC films. The test results show that wear resistance of samples increases with the applied voltage, and the friction coefficient of DLC films lies in the range of 0.15-0.20

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Plasma Science, IEEE Transactions on  (Volume:34 ,  Issue: 4 )