High Voltage (up to 20V) Devices Implementation in 0.13 um BiCMOS Process Technology for System-On-Chip (SOC) Design

This paper describes the integration of the 20V complementary drain-extended MOS (DECMOS) and fully isolated drain-extended NMOS (DENMOS) transistors into a high-volume 0.13mum CMOS technology with two additional masks. The 20V devices were optimized for Rsp-BVdss performance without compromising the advanced 1.5V CMOS performance in the 0.35mum pitch copper, low-K dielectric process flow. This cost-effective process is very competitive for the power management (PM) chip design of portable devices