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Improved Dielectric Isolation HVIC Technology (SODI) in Transfer Mold Package

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5 Author(s)
Akiyama, H. ; Power Device Div., Mitsubishi Electr. Corp., Fukuoka ; Yasuda, N. ; Moritani, J. ; Takanashi, K.
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Silicon on double insulator (SODI) is a novel and promising technology in order to develop higher breakdown voltage and to reduce cost of dielectric isolation HVIC. First work of SODI is published in 2004, and some improvements have been continued. As a result, a new path has opened that it would be possible to apply the transfer mold package assembly process to SODI with keeping its high breakdown voltage (>800V) easily. By these improvements, we hope that the SODI technology can contribute to general purpose motor-drive technology in the application of intelligent power modules (IPMs). The details of the technical improvements and a pre-driver SODI-HVIC trial fabrication results are reported in this paper

Published in:

Power Semiconductor Devices and IC's, 2006. ISPSD 2006. IEEE International Symposium on

Date of Conference:

4-8 June 2006