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Performance of a raster scanning laser display system using diamond shaped frame supported micromirror

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5 Author(s)
Chang-Hyeon Ji ; MS Group, LG Electron. Inst. of Technol., Seoul ; Moongoo Choi ; Sang-Cheon Kim ; See-Hyung Lee
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We describe the design, fabrication, and experimental results of a raster scanning laser display system using micromachined electrostatic scanning micromirror. The micromirror is comprised of a diaphragm mirror plate supported by an array of diamond shaped support frame, and movable comb electrodes. A prototype raster scanning laser display system using the fabricated micromirror, having optical scan angle of 16.9deg at resonance frequency of 19.55 kHz, as the horizontal scanner was developed and tested. To compensate for the nonlinear characteristics of the scanner, a simple image correction method was developed, and the projected image was analyzed and compared with the simulation results

Published in:

Photonics Technology Letters, IEEE  (Volume:18 ,  Issue: 16 )