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Design Parameters Optimization Using Process Variations of the Pull-In Voltage for MEMs

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3 Author(s)
R. Voicu ; Nat. Inst. for R&D in Microtechnologies, Bucharest ; C. Tibeica ; M. Bazu

Probability density function for the pull-in voltage of the electrostatically actuated micro-bridges due to variations of some dimensional parameters was estimated using Monte Carlo approach. Variations of the pull-in voltage were analyzed in order to find out optimum design parameters taking into account the given process variations in manufacturing micro-bridge structures

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2006 25th International Conference on Microelectronics

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