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Design Parameters Optimization Using Process Variations of the Pull-In Voltage for MEMs

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3 Author(s)
Voicu, R. ; Nat. Inst. for R&D in Microtechnologies, Bucharest ; Tibeica, C. ; Bazu, M.

Probability density function for the pull-in voltage of the electrostatically actuated micro-bridges due to variations of some dimensional parameters was estimated using Monte Carlo approach. Variations of the pull-in voltage were analyzed in order to find out optimum design parameters taking into account the given process variations in manufacturing micro-bridge structures

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Microelectronics, 2006 25th International Conference on

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