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High Performance Band-Pass Filter Embedded into SoCs Using VLSI Backend Interconnects and High Resistivity Silicon Substrate

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4 Author(s)
C. C. Chen ; Inst. of Electron. Eng., Nat. Chiao Tung Univ. ; A. Chin ; M. T. Yang ; S. Liu

High-performance band-pass filters are demonstrated on VLSI incorporating interconnects and high resistivity substrate. The resonating frequency of this coupled-line filter increases not only with the increasing spacing-gap but are with increasing IDM thickness. This band-pass filter, low insertion loss and wide bandwidth characteristics, are suitable for the advanced wireless system. The established equivalent circuit model for this band-pass filter corresponds with the measured results and provides effectively RF passive components embedded into system-on-chips

Published in:

2006 International Interconnect Technology Conference

Date of Conference:

5-7 June 2006