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Comparison of effective work function extraction methods using capacitance and current measurement techniques

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13 Author(s)

The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV-in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.

Published in:

Electron Device Letters, IEEE  (Volume:27 ,  Issue: 7 )

Date of Publication:

July 2006

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