Cart (Loading....) | Create Account
Close category search window

Characterization of copper germanide as contact metal for advanced MOSFETs

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Chao, Y.-L. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Xu, Y. ; Scholz, R. ; Woo, J.C.S.

The material and electrical characteristics of ε-Cu3Ge as a contact metal were investigated. The samples were prepared by direct copper deposition on germanium wafers, followed by rapid thermal annealing. The ε-Cu3Ge formed at 400 °C has a resistivity of 6.8 μΩ·cm, which is lower than typical silicides for silicon CMOS. Cross-sectional transmission electron microscopy showed smooth germanide/germanium interface, with a series of nanovoids aligning close to the top surface. These voids are believed to be the results of Kirkendall effect arising from the different diffusion fluxes of copper and germanium. The specific contact resistivity of Cu3Ge, obtained from four-terminal Kelvin structures, was found to be as low as 8×10-8 Ω·cm2 for p-type germanium substrate. This low resistivity makes Cu3Ge a promising candidate for future contact materials.

Published in:

Electron Device Letters, IEEE  (Volume:27 ,  Issue: 7 )

Date of Publication:

July 2006

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.