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Parametric Finite Element Analysis for Reduced Order Modeling of MEMS

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4 Author(s)
Kolchuzhin, V. ; Dept. Microsyst. & Precision Eng., Chemnitz Univ. of Technol. ; Mehner, J.E. ; Gessner, T. ; Doetzel, W.

In this paper we describe a simulation methodology based on FEM to automatic generating reduced order models of coupled microelectro-mechanical systems (MEMS). In particular, the time consuming FE data sampling process should be replaced by a single finite element run. The idea of the new approach is to compute not only the governing system matrices but also high order partial derivatives with regard to design parameters by means of automatic differentiation. As result, Taylor vectors of the model response can be expanded in the vicinity of the initial position with regard to dimensional and physical parameters. The approach is demonstrated on example of a micromirror cell

Published in:

Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on

Date of Conference:

24-26 April 2006