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Finite Element Modeling of Electrostatic MEMS Including the Impact of Fringing Field Effects on Forces

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4 Author(s)
M. Boutaayamou ; Dept. of Electrical Engineering and Computer Science (ELAP), University of Liege, Sart Tilman Campus, Building B28, B-4000, Liege, Belgium,, +32 (0) 4 366 37 10 ; K. H. Nair ; R. V. Sabariego ; P. Dular

The numerical models describing the behaviour of electrostatically actuated microsystems often disregard fringing fields. However, taking the fringing fields into account is crucial for an accurate computation of the electrostatic forces. In this work, the finite element method is applied for modeling electrostatic actuators. The electrostatic force distribution is obtained by locally applying the virtual work method. A micro-beam and a comb drive are considered as test cases. The impact of the fringing field effects on the accuracy of electrostatic forces is shown through 2D and 3D parametric studies

Published in:

EuroSime 2006 - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems

Date of Conference:

24-26 April 2006