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Finite Element Modeling of Electrostatic MEMS Including the Impact of Fringing Field Effects on Forces

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4 Author(s)
Boutaayamou, M. ; Dept. of Electr. Eng. & Comput. Sci., Liege Univ. ; Nair, K.H. ; Sabariego, R.V. ; Dular, P.

The numerical models describing the behaviour of electrostatically actuated microsystems often disregard fringing fields. However, taking the fringing fields into account is crucial for an accurate computation of the electrostatic forces. In this work, the finite element method is applied for modeling electrostatic actuators. The electrostatic force distribution is obtained by locally applying the virtual work method. A micro-beam and a comb drive are considered as test cases. The impact of the fringing field effects on the accuracy of electrostatic forces is shown through 2D and 3D parametric studies

Published in:

Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on

Date of Conference:

24-26 April 2006