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Shear Horizontal Surface Acoustic Wave Sensors Based on Polyaniline for Ammonia Gas Sensing

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3 Author(s)
Chi-Yen Shen ; Dept. of Electr. Eng., I-Shou Univ., Kaohsiung County ; Cheng-Liang Hsu ; De-Lu Wang

A shear horizontal surface acoustic wave (SH-SAW) sensor coated with polyaniline (PANI) was investigated in this study. The frequency shift of SH-SAW was measured for the response to ammonia in this study. The temperature effect was also discussed in order to find the suitable temperature of operation. The response of the SH-SAW sensor immediately responded the concentration of ammonia gas. Moreover, this sensor presented a sensitivity of 0.03 ppm/ppm at 23degC. The responses to ammonia decreased with decreasing temperature below 23degC

Published in:

Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on

Date of Conference:

24-26 April 2006