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Quasi-planar high-Q millimeter-wave resonators

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5 Author(s)
Vanhille, K.J. ; Dept. of Electr. & Comput. Eng., Colorado Univ., Boulder, CO ; Fontaine, D.L. ; Nichols, C. ; Filipovic, D.S.
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Several low-profile 250-mum-high Ka-band cavity resonators are demonstrated with resonant frequencies near 26 GHz and unloaded quality (Q) factors greater than 400. The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:54 ,  Issue: 6 )