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Nonlinear effects and anomalous transport in RF plasmas

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1 Author(s)
F. F. Chen ; California Univ., Los Angeles, CA, USA

Three examples are given of experiments which give evidence of nonclassical behavior in partially ionized, low-temperature, radio-frequency plasmas: anomalous skin depth in inductively coupled plasmas, transport by fluctuations in helicon plasmas, and parametric instabilities in helicon plasmas. A variety of physics puzzles have been found in industrial plasmas, and techniques learned from high-temperature, fusion research are used to solve them. Low-temperature plasma physics is becoming a precise, challenging discipline in the field of plasmas

Published in:

IEEE Transactions on Plasma Science  (Volume:34 ,  Issue: 3 )