Nonlinear effects and anomalous transport in RF plasmas

Three examples are given of experiments which give evidence of nonclassical behavior in partially ionized, low-temperature, radio-frequency plasmas: anomalous skin depth in inductively coupled plasmas, transport by fluctuations in helicon plasmas, and parametric instabilities in helicon plasmas. A variety of physics puzzles have been found in industrial plasmas, and techniques learned from high-temperature, fusion research are used to solve them. Low-temperature plasma physics is becoming a precise, challenging discipline in the field of plasmas