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Finite-element simulation of wave propagation in periodic piezoelectric SAW structures

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7 Author(s)
Hofer, M. ; Dept. of Sensor Technol., Erlangen-Nurnberg Univ., Erlangen, Germany ; Finger, N. ; Kovacs, G. ; Schoberl, J.
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Many surface acoustic wave (SAW) devices consist of quasiperiodic structures that are designed by successive repetition of a base cell. The precise numerical simulation of such devices, including all physical effects, is currently beyond the capacity of high-end computation. Therefore, we have to restrict the numerical analysis to the periodic substructure. By using the finite-element method (FEM), this can be done by introducing periodic boundary conditions (PBCs) at special artificial boundaries. To be able to describe the complete dispersion behavior of waves, including damping effects, the PBC has to be able to model each mode that can be excited within the periodic structure. Therefore, the condition used for the PBCs must hold for each phase and amplitude difference existing at periodic boundaries. Based on the Floquet theorem, our two newly developed PBC algorithms allow the calculation of both, the phase and the amplitude coefficients of the wave. In the first part of this paper we describe the basic theory of the PBCs. Based on the FEM, we develop two different methods that deliver the same results but have totally different numerical properties and, therefore, allow the use of problem-adapted solvers. Further on, we show how to compute the charge distribution of periodic SAW structures with the aid of the new PBCs. In the second part, we compare the measured and simulated dispersion behavior of waves propagating on periodic SAW structures for two different piezoelectric substrates. Then we compare measured and simulated input admittances of structures similar to SAW resonators.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:53 ,  Issue: 6 )