Referenced Items are not available for this document.
Polysilicon interconnect high-frequency measurements (45 MHz to 2 GHz) and SPICE-based transmission-line modeling have been performed on CMOS IC test structures. The methodology consists of the following steps: (1) customized transmission-line layout for microwave coplanar probe-based test; (2) calibration of probe reference plane using the ISS (impedance-standard substrate) standard and the LRM (line-reflect-match) calibration technique; (3) calibration of silicon substrate pad-parasitics; (4) S-parameter measurement of transmission lines and subtraction of system and substrate parasitics; and (5) SPICE circuit model extraction and parameter optimization. Results from ongoing measurements of diffusion lines are also reported
Published in:
Custom Integrated Circuits Conference, 1991., Proceedings of the IEEE 1991
Date of Conference: 12-15 May 1991
- Page(s):
- 23.5/1 - 23.5/4
- Meeting Date :
- 12 May 1991-15 May 1991
- Print ISBN:
- 0-7803-0015-7
- INSPEC Accession Number:
- 4188625
- Conference Location :
- San Diego, CA
- Digital Object Identifier :
- 10.1109/CICC.1991.164042
- Product Type:
- Conference Publications
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