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A fully integrated multisite pressure sensor for wireless arterial flow characterization

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2 Author(s)
A. D. DeHennis ; Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA ; K. D. Wise

This paper presents a fully integrated battery-free sensing system that uses a two-site wireless pressure measurement for the detection of arterial stenosis. The remotely powered system uses a backscatter-modulated passive-telemetry interface and transmits sensor as well as reference information to an external system. The monolithic process used to realize the system integrates a 3 μm BiCMOS circuit with silicon-on-glass absolute pressure sensors and an on-chip antenna. The wireless sensor interface consumes 340 μW and uses capacitance-to-frequency conversion for readout of the vacuum-sealed pressure transducers. The integrated device has a 200 μm profile and a volume of 2 mm3. The system can sense a reduction in flow of 13%, corresponding to a differential pressure of 3 mmHg.

Published in:

Journal of Microelectromechanical Systems  (Volume:15 ,  Issue: 3 )