By Topic

A nanoporous silicon membrane electrode assembly for on-chip micro fuel cell applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Kuan-Lun Chu ; Dept. of Chem. & Biomolecular Eng., Univ. of Illinois, Urbana, IL, USA ; S. Gold ; V. Subramanian ; Chang Lu
more authors

Silicon-based fuel cells are under active development for chip-scale electrical power supply. One of the greatest challenges in micro-fuel-cell research is the development of a suitable proton conducting membrane material that is compatible with standard silicon microfabrication technology. In this paper, the use of nanoporous silicon as a novel proton conducting membrane material in a microscale fuel cell membrane electrode assembly (MEA) is demonstrated. The devices were fabricated by first creating 100-μm-thick silicon windows in a standard silicon wafer, anodizing to create pores in the windows, and then painting catalyst layers and insulators onto the porous structures. Using 5 M formic acid and 0.5 M sulfuric acid as the fuel, the fuel cell peak power density reached about 30 mW/cm2 at current density level of about 120 mA/cm2. These results represent the successful integration of a new class of protonic conductor into a microfabricated silicon fuel cell.

Published in:

Journal of Microelectromechanical Systems  (Volume:15 ,  Issue: 3 )