By Topic

Large-stroke MEMS deformable mirrors for adaptive optics

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Dagel, D.J. ; Sandia Nat. Labs., Albuquerque, NM, USA ; Cowan, W.D. ; Spahn, O.B. ; Grossetete, G.D.
more authors

Surface-micromachined deformable mirrors that exhibit greater than 10 μm of stroke are presented. The segmented arrays described here consist of 61 and 85 hexagonal, piston/tip/tilt mirrors (three actuators each) with diameters of 500 and 430 μm, respectively, and fill a 4 mm circular aperture. Devices were packaged in 208 and 256 pin-grid arrays and driven by a compact control board designed for turn-key operation. After metallization and packaging mirror bow is ∼680 nm (λ/1), but a heat-treatment procedure is proposed for controlling mirror curvature to better than λ/10. An optical test bed was used to demonstrate basic beam splitting and open-loop aberration correction, the results of which are also presented.

Published in:

Microelectromechanical Systems, Journal of  (Volume:15 ,  Issue: 3 )