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Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

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9 Author(s)
Verd, J. ; Univ. Autonoma de Barcelona, Spain ; Uranga, A. ; Teva, J. ; Lopez, J.L.
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A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically integrated with capacitive CMOS readout electronics, is presented. The resonator is fabricated directly on a commercial CMOS technology using the top metal level as a structural layer. A maskless single-step wet-etching process for mechanical structure release after the standard CMOS integration process is the only postfabrication requirement. Electrical characterization of the electromechanical device demonstrates the feasibility of implementing a CMOS-microelectromechanical system for high-frequency applications using a standard conventional CMOS technology.

Published in:

Electron Device Letters, IEEE  (Volume:27 ,  Issue: 6 )