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Characterization of micromachined silicon rectangular waveguide at 400 GHz

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5 Author(s)
P. L. Kirby ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; D. Pukala ; H. Manohara ; I. Mehdi
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We present the first characterization of a micromachined silicon rectangular waveguide at 400GHz. The silicon waveguide has an average loss of 0.086dB/mm for a range of 350-460GHz. The waveguides are formed using well known microfabrication techniques and demonstrate a successful first step towards the use of silicon waveguides as a viable option for THz systems.

Published in:

IEEE Microwave and Wireless Components Letters  (Volume:16 ,  Issue: 6 )