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High-mobility poly-Si TFT's fabricated by a novel excimer laser crystallization method

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3 Author(s)
K. Shimizu ; Tokyo Inst. of Technol. ; O. Sugiura ; M. Matsumura

Summary form only given. High-mobility poly-Si TFTs (thin-film transistors) were fabricated by a novel excimer-laser crystallization method using dual-beam irradiation. The field effect mobility of the TFT was as high as 380 cm2/V-s. The origin of high mobility was the large grain size (2 μm) of poly-Si film obtained by the method used. Si(50 nm)/SiO2(80 nm)/Si(100 nm) structure was deposited over a quartz substrate and irradiated by an ArF excimer laser at 300 mJ/cm2 on both front and back surfaces at the same time. Bottom-gate TFTs were fabricated using the top Si layers as active layer; SiO2 and bottom Si layers were used as gate insulator and gate electrode, respectively; aluminum as source/drain electrodes were directly deposited over the active layer

Published in:

IEEE Transactions on Electron Devices  (Volume:39 ,  Issue: 11 )