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Deep glass etched microring resonators based on silica-on-silicon technology

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3 Author(s)
H. Ou ; COM . DTU, Tech. Univ. of Denmark, Lyngby, Denmark ; K. Rottwitt ; H. Philipp

Microring resonators fabricated on silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.

Published in:

Electronics Letters  (Volume:42 ,  Issue: 10 )