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Demonstration of piezoelectric actuated GaAs-based MEMS tunable VCSEL

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6 Author(s)
Huang, M.C.Y. ; Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA ; Kan Bun Cheng ; Ye Zhou ; Pesala, B.
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We report the first experimental demonstration of a novel piezoelectric actuated microelectromechanical systems (MEMS) tunable vertical-cavity surface-emitting laser (VCSEL). A large physical deflection was obtained with the piezoelectric actuated MEMS cantilever beam monolithically integrated with the VCSEL distributed Bragg reflector. Single-mode emission and continuous tuning were achieved at room temperature under continuous-wave operation

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Photonics Technology Letters, IEEE  (Volume:18 ,  Issue: 10 )