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MOEMS variable optical attenuators using rotary comb drive actuators

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3 Author(s)
Yeh, J.A. ; Inst. of Micro-Electro-Mech. Syst., Nat. Tsing Hua Univ., Hsinchu ; Shiue-Shr Jiang ; Chengkuo Lee

We propose a novel design of variable optical attenuator using electrostatic rotary comb actuator. Our optimized electromechanical design results in large dynamic range of 57-dB attenuation, low driving voltage of 3.6 dc V for 30-dB attenuation, fast response time of 3 ms, and excellent optical transient stability with no mechanical overshoot. The optimized layout design also contributes small device footprint of 3.2times4.7 mm2 only

Published in:

Photonics Technology Letters, IEEE  (Volume:18 ,  Issue: 10 )