By Topic

Density Control of Carbon Nanotubes Using Ethanol Vapor Flow

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Y. Takei ; Graduate School of Information Science and Technology, The University of Tokyo, JAPAN, E-mail: takei@leopard.t.u-tokyo.acjp ; K. Hoshino ; K. Matsumoto ; I. Shimoyama

We have achieved the density control of carbon nanotubes (CNTs) by changing ethanol vapor flow speed in chemical vapor deposition (CVD). We calculated the ethanol mean free path under the CVD condition. From the calculation we estimated the minimum width of the flow channel that ethanol molecules can act as continuum. We fabricated the flow channels on a silicon wafer where ethanol vapor runs with its speed changing. Holes which CNTs can bridge were fabricated at the bottom of the flow channels. After the CVD process, we observed CNTs bridging the holes with scanning electron microscope (SEM). As a result, we observed that density of the synthesized CNTs, in other words, total length of the CNTs bridging the holes, increased with increasing the ethanol vapor flow speed.

Published in:

19th IEEE International Conference on Micro Electro Mechanical Systems

Date of Conference: