Cart (Loading....) | Create Account
Close category search window
 

A MEMS Condenser Microphone for Consumer Applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
4 Author(s)
Weigold, J.W. ; Analog Devices, Inc. Micromachined Products Division, Cambridge, MA, USA ; Brosnihan, T.J. ; Bergeron, J. ; Zhang, X.

This paper describes the design, fabrication, testing, and characterization of a MEMS microphone fabricated at Analog Devices. The device consists of a polysilicon diaphragm suspended over a single crystal silicon backplate fabricated on silicon on insulator (SOI) wafers. The MEMS microphone has been successfully fabricated and tested in an anechoic chamber. The microphone is fabricated using a process that is compatible with inexpensive high volume production using unit processes that are currently used to fabricate inertial sensors. Details of the design, fabrication, and electrical and acoustic characterization of the microphone will be presented.

Published in:

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

Date of Conference:

2006

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.