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A MEMS Condenser Microphone for Consumer Applications

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4 Author(s)
Weigold, J.W. ; Analog Devices, Inc. Micromachined Products Division, Cambridge, MA, USA ; Brosnihan, T.J. ; Bergeron, J. ; Zhang, X.

This paper describes the design, fabrication, testing, and characterization of a MEMS microphone fabricated at Analog Devices. The device consists of a polysilicon diaphragm suspended over a single crystal silicon backplate fabricated on silicon on insulator (SOI) wafers. The MEMS microphone has been successfully fabricated and tested in an anechoic chamber. The microphone is fabricated using a process that is compatible with inexpensive high volume production using unit processes that are currently used to fabricate inertial sensors. Details of the design, fabrication, and electrical and acoustic characterization of the microphone will be presented.

Published in:

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

Date of Conference: